In this work, we presented the fabrication and testing of four types of stretchable electrodes design for piezoresistive sensor base on silver-nanowires (AgNWs) and polydimethylsiloxane (PDMS). The effect of oxygen plasma treatment and electron beam evaporation (e-beam evaporation) on the stretchability and contact resistance between the electrodes and piezoresistive material were investigated with the assistance of SEM images and EDS spectra. The oxygen plasma treatment could degrade the stretchability and contact quality, but improved the metal layer evaporated on the AgNWs/PDMS conductor. The e-beam evaporation could optimize the contact quality and insulate the AgNWs network from effect of oxygen plasma treatment. However, the untreated PDMS usually had a poor adhesion with the metal layer. So for the performance improvement of AgNWs/PDMS electrode, efforts should be made on design of the fabricating process or introduction of new technology that could keep the density of the AgNWs network, meanwhile enhance the adhesion strength of metal layer to the AgNWs/PDMS conductor. The results could be used to guide the fabrication of qualified electrodes that comprise high stretchability and low contact resistance for skin-like piezoresistive sensor.
University of Minnesota Duluth, University of Science and Technology Beijing
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