On-Demand Recordings

View the collection of on-demand sessions, including recordings of the live virtual sessions, featured sessions from the Seattle on-site meeting, and individual talks posted by your colleagues. This content will be available to watch through June 15, 2024. 

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04:30pm - 06:30pm EDT - April 22, 2024
Robert Kaplar, Session Chair; Sriram Krishnamoorthy, Session Chair
Symposia Sessions: EL04: Wide and Ultra-Wide Bandgap Materials, Devices and Applications
Session Type: Onsite Oral

Monday
Session:

Availability and production capabilities in diamond are rapidly expanding. To enable nextgeneration diamond-based solutions, particularly in the quantum and semiconductor realms, WD Advanced Materials (“WDAM”), in cooperation with key industry collaborators, has developed new processes for the synthesis of large-scale single-crystal diamond wafers for electronic applications. Through this talk, led by Chief Technology Officer John Ciraldo, WDAM will share an overview of recent product development breakthroughs supporting these emerging technologies, including R&D results, output from the D2 SCALE under DARPA’s LADDIS initiative, and the latest on a new U.S.-based consortium, created to supply synchrotron-grade diamond to the national market through the DOE ARDAP program. WDAM will share third-party characterization data demonstrating exceptional material quality characteristics coupled with large substrate sizes, including anonymized comparisons to other commercially available products. In furtherance of the team’s form factor expansion efforts, WDAM will also present 13mm+ wafers with full x-ray mapping, highlighting narrow rocking curves of about 30 arcseconds, ultra-high doping concentrations, and evidence of strong electronic transport properties. The discussion will conclude with a summary of new material science process and technology solutions developed at WDAM, including defect mitigation; selective patterning and deposition; heterostacks (e.g. PN/PIN junctions); and continued scale in both material size and quality.

04:30pm - 07:15pm EDT - April 23, 2024
Tse Nga Ng, Session Chair; Angel Yanguas-Gil, Session Chair; Santanu Bag, Session Chair
Symposia Sessions: EL01: Surfaces and Interfaces in Electronics and Photonics
Session Type: Onsite Oral

Tuesday
Session:

The road to miniaturization in semiconductor microelectronic technology has led to an ongoing demand for identification of suitable approaches for device performance enhancements and raised requirements of new materials and device structures [1].

Here, we report the electronic device performance improvement opportunity of silicon nanostructures without direct channel doping by adding Al acceptor states into a thin SiO2 layer surrounding the silicon [2]. This novel concept is analogous to modulation doping in III-V semiconductors. The manifestation of the dielectric by incorporation of trivalent Al impurities gives the possibility for electrons from silicon to tunnel to the acceptor states in SiO2 yielding silicon with holes as majority carriers. Our method removes the disadvantages of impurity doping, namely a required thermal ionization, inelastic impurity scattering, problematic dopant activation vs. out-diffusion and statistical fluctuations of dopant density [3-4]. The SiO2 doping also facilitates interface passivation by discharging the dangling bond defects at Si/SiO2 interface [5]. To this end, the doping approach is demonstrated on silicon channels fabricated on a silicon-on-insulator (SOI) substrate with nickel silicide contacts. The same layers sequence is extended to a transfer length measurement (TLM) structure.

It was experimentally observed that the energetic state of Al-acceptors in SiO2 formed by atomic layer deposition of Al2O3 on thin thermally grown SiO2 induces a corresponding shift in the Fermi level of silicon towards the valence band. A variation in the density of hole carriers in the silicon channel is regulated by the variation of number of ALD Al2O3 cycles [6] which governs both the silicon resistivity and the specific contact resistivity. The effect of addition of a monolayer of ALD Al2O3 is reflected in the reduction of silicon resistivity to a value as low as 0.04-0.06 Ω●cm and a contact resistivity as low as 3.5E-7 Ω●cm2 [7].

A single segment of the fabricated TLM structure can also perform equivalently as a transistor with the body contact operated as a back gate. The performance of the transistor is improved by an enhanced hole carrier transport with an ION/IOFF ratio of up to 106 at a drain voltage of -1V. The NiSi source/drain contacts placed directly within the SOI region also undergoes a transition from Schottky to low-resistance contact as an effect of the barrier height reduction [8]. The drawbacks of conventional impurity doped devices such as dopant scattering, fluctuating device performance due to dopant diffusion, and even requirements of lightly or heavily doped source/drain regions can be circumvented by the new method. The aforesaid impurity free doping of the channel would be ideal for a high performance, high mobility device and enables new advancements encompassing areas of low-temperature physics and quantum technology.

[1] Wong. H, and Iwai. H, Physics World 18.9 (2005): 40.
[2] König. D, et al., Scientific Reports 7.1 (2017): 46703.
[3] Norris. D. J., et al., Science 319.5871, 1776 (2008).
[4] Nagarajan. S, et al., Solid-State Electronics 208 (2023): 108739.
[5] Hiller. D, et al., J. App. Phys. 125.1 (2019): 015301.
[6] Ratschinski. I, et al., physica status solidi (a) (2023): 2300068.
[7] Nagarajan. S, et al., Advanced Materials Interfaces, Oct 2023 (Accepted).
[8] Nagarajan. S, et al., Device Research Conference. IEEE, 2023.


Co-Author(s): Daniel Hiller (TU Bergakademie Freiberg), Ingmar Ratschinski (TU Bergakademie Freiberg), Dirk König (Australian National University), Thomas Mikolajick (NaMLab gGmbH), Jens Trommer (NaMLab gGmbH)

04:30pm - 08:00pm EDT - April 23, 2024
Yen-Lin Huang, Session Chair; Ruijuan Xu, Session Chair
Symposia Sessions: EL07: Emerging Ferroic Materials—Synthesis, Properties and Applications
Session Type: Onsite Oral

Tuesday
07:00pm - 07:15pm EDT - April 23, 2024
Kevin Crust, Presenter
Symposia Sessions: EL07: Emerging Ferroic Materials—Synthesis, Properties and Applications
Session Type: Onsite Oral
Session:

Electrostatic energy storage based on dielectric capacitors has garnered significant interest due to its fast charge-discharge speeds and high power density relative to electrochemical energy storage, but applications have been limited due to large leakage currents, relatively low energy storage density, and the presence of lead in materials[1,2]. NaNbO3 is a lead-free alternative which has received much research attention in the last decade but work has primarily focused on its bulk form, with NaNbO3-based systems displaying both antiferroelectric and relaxor ferroelectric behaviors at room temperature with promising energy storage properties[2,3]. Using pulsed laser deposition and selective etching, we have synthesized metal-insulator-metal heterostructures of La0.7Sr0.3MnO3 and NaNbO3 with high crystalline quality and coherent epitaxial strain across a range of thicknesses. Both strain and thickness have previously been noted to greatly affect the properties of NaNbO3 due to the close proximity of its antiferroelectric and ferroelectric ground states[4,5]. Through careful optimization of the growth conditions, we achieve minimal leakage current even under large external electric fields and can observe relaxor-like ferroelectric behavior in both our thinnest samples (below 50 nm of NaNbO3) and our thickest samples (above 150 nm). This allows us to achieve improvements in both recoverable energy-storage density Wrec and energy efficiency η compared to previous NaNbO3 thin films[6,7]. This work demonstrates the potential of NaNbO3 for dielectric energy storage and the advantages of epitaxial, single-crystal films for electrical characterization.

[1] H. Pan et al., Science 374, 100-104 (2021).
[2] M.-H. Zhang et al., Nat. Comm. 14, 1525 (2023).
[3] N. Luo et al., Nat. Comm. 14, 1776 (2023).
[4] T. Schneider et al., ACS Omega 8, 23587-23595 (2023).
[5] R. Xu et al., Adv. Mater. 35, 2210562 (2023).
[6] T. Shiraishi et al., J. Appl. Phys. 128, 044102 (2020).
[7] H. Dong et al., Ceram. Inter. 48, 16215-16220 (2022).


Co-Author(s): Aarushi Khandelwal (SLAC National Accelerator Laboratory), Ruijuan Xu (North Carolina State University), Harold Hwang (SLAC National Accelerator Laboratory)

Tuesday
Session:

The data retention is one major issue of requirements for non-volatile memory (NVM) application, i.e. non-zero remnant polarization (Pr) of Ferroelectric random-access-memory (FeRAM) application at standby (bias-free) [1][2]. Recently, antiferroelectric HfZrO2 (AFE-HZO) under built-in bias of fixed charge (Qf) and/or interface dipole by Al2O3 interlayer leads applicable Pr [3][4]. Furthermore, AFE-HZO exhibits intrinsic capability of high-speed response and long endurance [5]. However, the validation of bilayer of AFE and dielectric (DE) is lack for further discussion. In this work, the technique of First-Order Reversal Curve (FORC) [6][7] will be employed to reveal the built-in bias based coercive field (Ec) distribution for AFE/DE.
The FORC diagram can determine the distribution of the EC by multiple P-E loops measurement. The FORC distribution function ρ (Er, E) shows the concentration of EC, and the procedure can be achieved as following. The initial field of the waveform is the saturation field (Esat), sweeping from the Esat to the reversal field (Er) and then back to the Esat. Then the step is repeated and Er range is from Esat reversing gradually to -Esat. The metal/ferroelectric/metal (MFM), metal/antiferroelectric/metal (MAFM) and metal/antiferroelectric/insulator/metal (MAFIM) were prepared for FORC analysis. The MFM shows typical FE-behavior and 2Pr > 60 mC/cm2. For MAFM, the 2Pr almost zero due to polarization compensation at 0 MV/cm. For MAFIM, the “FE-like” characteristic is presented due to built-in bias. The origins of the built-in bias with Al2O3 are unbalance of surface energy for interface dipole and insufficient bonding for positive or negative fixed charge [8][9]. The single EC distribution of MFM by FORC diagram indicates the typical FE behavior and it concentrates at ~1.2 MV/cm. For MAFM, there are two Ec distributions at ~ -0.5 MV/cm and 2.5 MV/cm, and this is attributed to the multi-peak of Ec for AFE. For MAFIM, the single Ec distribution is occurred at ~1.5-2 MV/cm. The FORC methodology is employed to validate the built-in bias existence and non-zero Pr for AFE/DE system.
The authors are grateful for the funding support by Ministry of Science and Technology (NSTC) 112-2218-E-A49-013-MBK, 112-2221-E-002-252-MY3, 111-2221-E-002-203-MY3, and process supported by TSRI & NFC, Taiwan.

References:
[1]. D. Takashima, "Overview of FeRAMs: Trends and perspectives," 2011 11th Annual Non-Volatile Memory Technology Symposium Proceeding, Shanghai, China, 2011, pp. 1-6.
[2]. J. Hur et al., "A Technology Path for Scaling Embedded FeRAM to 28nm with 2T1C Structure," 2021 IEEE International Memory Workshop (IMW), Dresden, Germany, 2021, pp. 1-4.
[3]. K.-Y. Hsiang et al., “Bilayer-based Antiferroelectric HfZrO2 Tunneling Junction with High Tunneling Electroresistance and Multilevel Nonvolatile Memory,” IEEE Electron Device Letters, vol. 42, no. 10, pp. 1464-1467, 2021.
[4]. C.-Y. Liao et al., “Experimental Insights of Reverse Switching Charge for Antiferroelectric Hf0.1Zr0.9O2,” IEEE Electron Device Letters, vol. 43, no. 9, pp. 1559-1562, 2022.
[5]. M. Pešić et al., “Comparative Study of Reliability of Ferroelectric and Anti-Ferroelectric Memories,” IEEE Transactions on Device and Materials Reliability, vol. 18, no. 2, pp. 154-162, 2018.
[6]. Tony Schenk et al.,“Complex Internal Bias Fields in Ferroelectric Hafnium Oxide,” ACS Appl. Mater. Interfaces 2015, 7, 20224−20233.
[7]. Laurentiu Stoleriu et al., “Analysis of switching properties of porous ferroelectric ceramics by means of first-order reversal curve diagrams,” Phys. Rev. B 74, 174107, 2006.
[8] D. K. Simon et al., "On the Control of the Fixed Charge Densities in Al2O3 - Based Silicon Surface Passivation Schemes, ” ACS Appl. Mater. Interfaces, vol. 7, no. 51, pp. 28215–28222, 2015.
[9] K. Kitaa, and A. Toriumi, “Origin of electric dipoles formed at high-k/SiO2 interface, ” Appl. Phys. Lett., 94, 132902, 2009.


Co-Author(s): Z.-X. Li (National Taiwan Normal University)

04:30pm - 08:00pm EDT - April 23, 2024
Venkat Selvamanickam, Session Chair; Xavier Obradors Berenguer, Session Chair
Symposia Sessions: QT04: Superconducting Materials
Session Type: Onsite Oral

Tuesday
Session:

When BMO-doped REBCO superconducting thin films (BMO+REBCO films) are prepared by vapor-phase-epitaxy (VPE) such as PLD and MOCVD, BMO self-organizes into nanorods and/or nanoparticles in the REBCO matrix. On the other hand, only incoherent BMO nanoparticles are observed in the solid phase growth method such as MOD. These experimental results suggest that the kinetics of the raw material particles at the surface of the thin film crystal growth contribute significantly to the self-organization of BMO. In fact, it is known that BMO exhibits various nanostructures depending on the growth temperature (TG), the volume fraction of BMO added (VBMO), and the deposition rate (DR) in the VPE. Therefore, we have developed a BMO+REBCO thin film growth simulation considering the kinetics using the Monte Carlo (MC) method to investigate the effect of deposition conditions on the nanostructure and the formation mechanism of nanorods.
As a result, the following trends were obtained.
(1) When TG is high and DR is low, nanorods are formed perpendicular and linear to the substrate surface. In addition, the diameter of the nanorods becomes thicker.
(2) At a lower TG and higher DR than (1), the nanorods are inclined and their diameters are narrower and their number density is higher.
(3) When DR is high enough, nanoparticles consisting of short nanorods are observed.
(4) Even if DR is high enough, linear nanorods can be obtained if TG and VBMO are sufficiently high.
The above trends are qualitatively in good agreement with experimental results and reported cases.
The time evolution of nanostructure formation can also be observed in the MC simulations. This indicates that nanorods are formed in the following steps. First, crystal nuclei of REBCO and BMO are generated on the substrate surface, from which crystal growth proceeds. Since the volume fraction of BMO is small, the BMO islands are eventually surrounded by the REBCO layer, and BMO can only grow in the direction perpendicular to the substrate surface. This process is repeated, consequently, BMO nanorods are formed. On the other hand, at low T<span style="font-size:10.8333px">G</span> and high DR, more BMO crystal nuclei are generated, which slows down the growth rate of BMO islands in the vertical direction, resulting in tilted or shortened nanorods. In other words, the competition between REBCO and BMO growth rates results in the formation of various nanostructures.
The above are mainly MC simulations in the VPE. On the other hand, the VLS growth method, which is a thin film growth method via thin liquid layer on a films surface, has the advantage that high-quality crystals can be fabricated even at high DR. However, it is difficult to control the BMO nanostructure. This is because the kinetics of the raw material particles is different from that of the VPE due to the presence of the thin liquid layer. Therefore, MC simulations concerning to the VLS growth method were developed and compared with the VPE for the formation of BMO nanostructures. MC simulations were also performed by intentionally adding screw dislocations to obtain a more detailed picture of the crystal growth environment.
In this presentation, we will discuss the growth conditions, nanostructure formation, and thin film crystal growth environment.

Acknowledgment
This work was partly supported by JST, CREST Grant Number JPMJCR2336, Japan.


Co-Author(s): Noriyuki Taoka (Aichi Institute of Technology), Yoshiyuki Seike (Aichi Institute of Technology), Tatsuo Mori (Aichi Institute of Technology), Tomonori Arita (Nagoya University), Tomoya Horide (Nagoya University), Yutaka Yoshida (Nagoya University)

Tuesday
07:30pm - 07:45pm EDT - April 23, 2024
Megumi Hirota, Presenter
Symposia Sessions: QT04: Superconducting Materials
Session Type: Onsite Oral
Session:

The zero electrical resistivity of superconducting materials makes them ideal for long-distance electric-current transmission. In particular, high-temperature superconducting (HTS) materials require only moderate cooling power, and a few trials have successfully demonstrated their capability for power transmission. Utilizing a long extended HTS cable to generate an external magnetic field is an emerging application with unique challenges. Our study introduces a conceptual design of a flat seabed coil, proportional to a ship’s size, for the purpose of ship magnetic deperming. Magnetic deperming involves imposing a magnetic field on the ship’s hull to saturate the magnetization of its steel components. The required field is estimated to be 2,400 A/m, achievable by the flat seabed coils in shallow water. The deperming process requires an alternating magnetic field with decreasing peak intensity. We have designed the coil for the largest destroyer and submarine ships of the Japanese Maritime Self-Defense Force. The parameters required for the coil design were obtained from publicly-available information. Our design features three racetrack-shaped coils, each carrying a maximum current of 200 kA, spanning a total length of 1,200 m for a single coil, set flat at a depth of 12 m, and cooled by liquid hydrogen, using the currently available HTS materials and technologies.

04:30pm - 07:15pm EDT - April 23, 2024
Yuen Hui, Session Chair; Alexander Shames, Session Chair
Symposia Sessions: NM02: Advances in Nanodiamonds
Session Type: Onsite Oral

Tuesday
Session:

Fluorescent nanodiamond (FND) has recently been regarded as a superior alternative reporter for lateral flow immunoassays (LFIA). The negatively charged nitrogen-vacancy (NV) center in FND is a point defect with unique magneto-optical properties, giving outstanding characteristics to detect biomarkers of diseases. Alzheimer’s disease (AD) is the most common form of dementia, characterized by decreased memory, thinking, cognition, behavior, personality, and ability to conduct everyday duties, which might result in complete brain failure and, eventually, death. The two most commonly used detection techniques to detect changes in the brain caused by AD are brain imaging (CT, MRI, PET) and lumbar puncture. However, while brain imaging is costly and time-consuming, lumbar puncture is controversial since 30% of patients get severe headaches followed by nausea and vomiting lasting more than a week. To this end, we have developed a Spin-Enhanced Lateral Flow Immuno-Assay (SELFIA) for non-invasive AD diagnostics utilizing the spin properties of the NV centers in FND to achieve background-free ultrasensitive detection. In addition, to enhance sensitivity and specificity, we employed a sandwich assay of SELFIA to further noncovalently conjugate FND to anti-pTau antibodies toward detecting pTau protein (a critical AD biomarker involved in AD pathology), while the capture antibody immobilized on the membrane. Note that we have a comparable result with Enzyme-Linked Immunosorbent Assay (ELISA), as our FND-based SELFIA only requires approximately 30 minutes to reach a detection limit of 7 pg/mL for pTau (the sensitivity/specificity threshold is 15 pg/mL in plasma). Hopefully, this study will contribute to developing a safe, simple, and accurate AD detection platform that can identify this illness in its earliest stages and might also be applied to other diseases in precision health.


Co-Author(s): Wesley Wei-Wen Hsiao (National Taiwan University of Science and Technology), Gianna Fadhilah (National Taiwan University of Science and Technology), Trong-Nghia Le (Academia Sinica), Huan-Cheng Chang (Academia Sinica), Wei-Hung Chiang (National Taiwan University of Science and Technology)

Tuesday
06:15pm - 06:45pm EDT - April 23, 2024
Yoshie Harada, Presenter
Symposia Sessions: NM02: Advances in Nanodiamonds
Session Type: Onsite Oral
Session:

Intracellular temperature fluctuations are thought to be closely related to higher order cellular phenomena. We have developed a method for imaging the temperature distribution in single living cells using a fluorescent polymer thermometer and fluorescence lifetime imaging microscopy to study the effects of intracellular temperature on cellular physiological activity. Previous experiments using the developed method have shown that during the G1 phase, the temperature of the nucleus is approximately 1°C higher than the temperature of the cytoplasm, as well as some mitochondria and centrosomes. The mechanisms that maintain this intracellular temperature heterogeneity and its physiological significance are not well understood. Recently, however, the mechanisms of physiological phenomena caused by fluctuations in intracellular temperature have begun to be elucidated. We hypothesized that intracellularly generated heat is not only a product of reactions, but also drives cellular responses. To test this hypothesis, we focused on cell differentiation, in which cells dramatically change their protein expression patterns. Using the neuronal model cell PC12, we investigated the relationship between neuronal differentiation and intracellular temperature. The results showed that intracellular temperature is involved in neuronal differentiation and associated neurite outgrowth. In addition to the aforementioned fluorescent polymer temperature sensor and fluorescence lifetime imaging microscopy, we also measured temperature using fluorescent nanodiamond particles containing negatively charged nitrogen vacancy centers as temperature sensors. We have previously shown that fluorescent nanodiamonds are able to measure temperature independent of external environmental influences such as pH, salt, and viscosity. To measure intracellular thermal conductivity, we also fabricated nanoparticles coated with polydopamine, which generates heat when exposed to light, around fluorescent nanodiamonds. Although the intracellular thermal conductivity has been assumed to be the same as the thermal conductivity of water, whether this is true or not was verified by actually measuring the intracellular thermal conductivity using the fabricated hybrid particles of polydopamine and fluorescent nanodiamonds. The results showed that, although the data were very uneven, on average the thermal conductivity inside the cell was several times smaller than the conductivity of water. In the present study, it is clear from microscopic observations that the hybrid particles are present inside the cell, but it is not known where in the cell they are localized. The variability of the data suggests variations in thermal conductivity depending on the location within the cell. Future work will use techniques to chemically modify the surface of the polydopamine-fluorescent nanodiamond hybrid particles, such as localizing the particles in mitochondria and nuclei, to measure thermal conductivity at different local positions in the cell to clarify what exactly produces such low thermal conductivity.

04:30pm - 08:00pm EDT - April 23, 2024
Henry Chan, Session Chair; Reinhard Maurer, Session Chair
Symposia Sessions: MT03: Machine Learning Methods, Data and Automation for Sustainable Electronics
Session Type: Onsite Oral

Tuesday
07:00pm - 07:15pm EDT - April 23, 2024
Andrea Albino, Presenter
Symposia Sessions: MT03: Machine Learning Methods, Data and Automation for Sustainable Electronics
Session Type: Onsite Oral
Session:

Data-driven material science has the potential to transform the way we design and develop materials. This emerging field represents a significant departure from traditional trial-and-error methods and empirical approaches that have characterized materials science for decades. Experiments in this area involve a multidimensional parameter space, making analysis challenging and time-consuming. Finding predictive empirical relations that allow for precise control over various aspects of the synthesis process has posed a challenge to human cognitive abilities alone. This becomes even more complex when combining datasets from different labs or from different scientists due to the lack of established standards for data models and methods to capture the large number of experimental details, including elaborate workflows and a large diversity of instruments for characterization. It requires a radical shift in how information is handled and research is performed. Experiment data must be complemented with its rich-metadata context, also covering ontologies and workflows according to the FAIR (findable, accessible, interoperable, reusable) principles [1].
Opening new perspectives towards finding structure, correlations, and novel information with data-analysis and AI tools, therefore, is intimately connected to the challenge of integrating this information into a FAIR infrastructure [2].

Here we present growth optimization of β-Ga2O3 thin films by metalorganic vapor phase epitaxy (MOVPE) on (1 0 0) β-Ga2O3 semi-insulating substrates which is a successful example of applying ML/AI approaches in materials synthesis. Improving the efficiency of this synthesis is highly relevant due to the wide range of electronic device applications based on Ga2O3. Applying AI modeling on the experimental data related to thin film growth, we effectively improved the growth rate and prediction of doping level in MOVPE-grown Si-doped β-Ga2O3 [3,4].

We will present the implementation of this use case in NOMAD (nomad-lab.eu) [5] and discuss the functionalities developed to digitize the entire data lifecycle in crystal growth and epitaxy, with the ultimate goal of FAIR data for materials growth. We developed and deployed Electronic Laboratory Notebooks (ELN) to document all relevant synthesis procedures. We will show how structured data opens up the potential to create tools that facilitate and automate data management, and the sustainable application of AI-based analytics, dedicated to process optimization in synthesis.

[1] Wilkinson, M., et al. The FAIR Guiding Principles for scientific data management and stewardship. Sci Data. 2016; 3, 160018.
[2] Scheffler, M., et al. FAIR data enabling new horizons for materials research. Nature. 2022; 604, 635-642.
[3] Chou, T.-S. et al. Toward Precise n-Type Doping Control in MOVPE-Grown β-Ga2O3 Thin Films by Deep-Learning Approach. Crystals. 2022; 12(1), 8.
[4] Chou, T.-S. et al. Machine learning supported analysis of MOVPE grown β-Ga2O3 thin films on sapphire. Journal of Crystal Growth. 2022; 126737.
[5] Scheidgen et al. NOMAD: A distributed web-based platform for managing materials science research data. Journal of Open Source Software. 2023; 8(90), 5388.


Co-Author(s): Ta-Shun Chou (Leibniz-Institut für Kristallzüchtung), Hampus Näsström (Humboldt-Universität zu Berlin), Amir Golparvar (Humboldt-Universität zu Berlin), Theodore Chang (Humboldt-Universität zu Berlin), Alvin Noe Ladines (Humboldt-Universität zu Berlin), Lauri Himanen (Humboldt-Universität zu Berlin), Mohammad Nakhaee (Humboldt-Universität zu Berlin), Andreas Popp (Leibniz-Institut für Kristallzüchtung), Jose Marquez Prieto (Humboldt-Universität zu Berlin), Sebastian Brückner (Leibniz-Institut für Kristallzüchtung), Markus Scheidgen (Humboldt-Universität zu Berlin), Claudia Draxl (Humboldt-Universität zu Berlin), Martin Albrecht (Leibniz-Institut für Kristallzüchtung)

06:30pm - 07:45pm EDT - April 23, 2024
Eiichi Kondoh, Session Chair; Silvia Armini, Session Chair
Symposia Sessions: EL03: Next-Generation Interconnects (Materials, Processes and Integration)—Toward Sustainable Microelectronics
Session Type: Onsite Oral

Tuesday
06:30pm - 07:00pm EDT - April 23, 2024
Kazumasa Tanida, Presenter
Symposia Sessions: EL03: Next-Generation Interconnects (Materials, Processes and Integration)—Toward Sustainable Microelectronics
Session Type: Onsite Oral
Session:

Abstract
We have developed a pixel pitch (1.35 µm) hybrid wafer bonding technology and successfully demonstrated three layer stacked backside illuminated (BSI) image sensor fabrication with full hybrid Cu-Cu direct bonding process. We found that plasma activation condition on the bonding wafer surface is a key factor of Cu-Cu contact yield improvement for smaller size Cu contacts. Optimized pixel pitch hybrid bonding shows good electrical and reliability performances. For three layer stacking, we developed through Si via (TSV) process. The second hybrid bonding process was adapted on the first hybrid bonded wafers and it shows good electrical performances. This three layer stack technology with pixel pitch hybrid bonding is promising for many different applications.
1. INTRODUCTION
Nowadays, hybrid wafer bonding with Cu-Cu connection is a major production technology of two layer stacked backside illuminated (BSI) image sensor applied for several applications [1]. In addition, three layer stacked BSI image sensor with through Si via (TSV) connection has been introduced to high performance cameras [2]. Furthermore, three layer stacked BSI with pixel pitch Cu-Cu connection will be required in order to realize much higher performance and multi functionality image sensors. In this paper, we developed key technologies for three layer stacking. One is pixel pitch hybrid wafer bonding with minute Cu-Cu connection, the other is three layer stacking process including TSV for middle layer and the 2nd hybrid wafer bonding. Finally, three layer stacking process was demonstrated by adapting these technologies.
2. PIXEL PITCH HYBRID BONDING
Cu-Cu contact with conventional hybrid wafer bonding conditions was studied utilizing the test element group (TEG) structure of Cu-Cu connection. The Cu-Cu contact pitch is 4.00 to 1.35 µm, and Cu electrode size is 1.25 to 0.42 µm square. As the results, Cu-Cu contact yield decreased as the contact pitch and pad size became smaller. The failure was Cu-Cu open mode with small gap between upper and lower Cu electrode. Cu-N compound layer on Cu electrode surface was identified after plasma surface activation by wafer bonder. It indicates that Cu-N compound layer was formed because Nitrogen was dosed into Cu surface during plasma activation. We considered that the Cu-N compound layer formed on both upper and lower minute Cu electrode was not broken by compressive stress of Cu thermal expansion during post annealing. Therefore, the Cu-N layer acted as a barrier, and Cu-Cu metal bonding between minute electrodes was not achieved.
N/Cu ratio of Cu electrode surface was decreased with lowering N dose of plasma condition and 1.35 µm pitch Cu-Cu contact yield (438k chains TEG) was improved. The Qual test of 1.91 µm pitch Cu-Cu contact (0.60 µm sq.) namely, electro migration (EM), stress migration (SM), temperature cycling (TMCL) and I-V, were passed.
3. THREE LAYER STACKING DEMONSTRATION
Three layer stacking was demonstrated following flow; The middle layer is bonded to the top layer by the 1st hybrid bonding with 1.91 µm pitch Cu-Cu connection. After the middle layer Si thinning, the Cu-TSV and the backside BEOL are formed. Then the 2nd hybrid bonding is done in order to bond the backside of the middle layer to the bottom layer with Cu-Cu connection. Finally, top layer Si is thinned and Al-TSV through top layer Si is formed. The stack chain TEG (10 chain circuit through Al-TSV, the 1st hybrid pixel pitch Cu-Cu, Cu-TSV, back BEOL and the 2nd hybrid Cu-Cu) shows the small resistance distribution. As the results, good electrical path of three layer stacking was established.
REFERENCES
[1] Y. Kagawa et al., “Novel Stacked CMOS Image Sensor with Advanced Cu2Cu Hybrid Bonding,” Proc. of IEEE Int. Electron Devices Meeting (IEDM), 2016, pp.208-211.
[2] Y. Kagawa et al., “3D Stacking Technologies for Advanced CMOS Image Sensors,” Proc. of IEEE Int. Interconnect Technology Conf. (IITC), 2021, WS-4.


Co-Author(s): Shigeru Suzuki (Tower Partners Semiconductor Co., Ltd.), Toshiki Seo (Tower Partners Semiconductor Co., Ltd.), Yasunori Morinaga (Tower Partners Semiconductor Co., Ltd.), Hayato Korogi (Tower Partners Semiconductor Co., Ltd.), Michinari Tetani (Tower Partners Semiconductor Co., Ltd.), Masakazu Hamada (Tower Partners Semiconductor Co., Ltd.), Ryuji Eto (Tower Partners Semiconductor Co., Ltd.), Takeshi Yamashita (Tower Partners Semiconductor Co., Ltd.), Yasuhiro Kato (Tower Partners Semiconductor Co., Ltd.), Naoaki Sato (Tower Partners Semiconductor Co., Ltd.), Tadami Shimizu (Tower Partners Semiconductor Co., Ltd.), Tetsuro Hanawa (Tower Partners Semiconductor Co., Ltd.), Hiroko Kubo (Tower Partners Semiconductor Co., Ltd.), Fumitaka Ito (Tower Partners Semiconductor Co., Ltd.), Yoshihiro Noguchi (Tower Partners Semiconductor Co., Ltd.), Masayuki Nakamura (Tower Partners Semiconductor Co., Ltd.), Ryuji Mizukoshi (Tower Partners Semiconductor Co., Ltd.), Masahiko Takeuchi (Tower Partners Semiconductor Co., Ltd.), Masakatsu Suzuki (Tower Partners Semiconductor Co., Ltd.), Naoto Niisoe (Tower Partners Semiconductor Co., Ltd.), Isao Miyanaga (Tower Partners Semiconductor Co., Ltd.), Atsushi Ikeda (Tower Partners Semiconductor Co., Ltd.), Susumu Matsumoto (Tower Partners Semiconductor Co., Ltd.)

08:00pm - 10:00pm EDT - April 23, 2024 | Room: Flex Hall C, Level 2, Summit
Lain-Jong Li, Session Chair; John Sudijono, Session Chair
Symposia Sessions: EL05: Two-Dimensional (2D) Materials and Heterostructures—Large-Scale Growth and Device Integration
Session Type: Onsite Poster

Tuesday
08:00pm - 10:00pm EDT - April 23, 2024 | Room: Flex Hall C, Level 2, Summit
Hongwoon Yun, Presenter
Symposia Sessions: EL05: Two-Dimensional (2D) Materials and Heterostructures—Large-Scale Growth and Device Integration
Session Type: Onsite Poster
Session:

The von Neumann architecture, which physically separates the CPU and memory devices, has been dominant for a long time. However, it has limitation in computational speed due to bottlenecks and waste a large amount of energy. To address the energy and speed issue, we made a neuromorphic system based on au nanoparticle floating gate memristor (AuNp-FGM).
Our memristor, utilizing graphene as floating gate, MoS2 as channel, have been recognized for its excellent performance [1,2]. Also, it has been recognized as one of the most promising candidates for neuromorphic system [3]. In this study, by forming au nanoparticles between floating gate and tunneling oxide, a two-terminal memristor which operates in the ±3V region is fabricated. Additionally, we made a neuromorphic array, calculated the energy used for learning simulation.
Using the change of the Fermi energy level (Ef) of graphene, (AuNp-FGM) exhibits memory characteristic. The device exhibits high on/off ratio over than 106, retention more than 9 hours and robust endurance more than 80,000 times. AuNp-FGM also showed low cycle to cycle variability of Cv = 3.6% (n = 90, Cv = , = standard deviation, = mean value). Furthermore, it showed excellent linearity, indicating applicability to neuromorphic systems. For 100 level potentiation (+4V, 0.5s), non-linearity factor ranges from 0.1 to 0.6. For 100 level depression (-3V, 0.2s), it ranges from 2.3 to 4.6 (n = 15). A similar trend was shown even when the number of input pulses was changed (50, 100, 200, 300, 400 inputs).
Based on AuNp-FGM, we fabricated a neuromorphic array consisting of 2 neurons and 32 synapses. Three types of data (horizontal, vertical, diagonal) were used in 40 learning simulation. The total energy consumed was 70uJ, which confirmed to be a 97% energy reduction compared to the previous experiment [3].

References
[1] [1] Vu, Q., Shin, Y., Kim, Y. et al. Nat. Commun. 7, 12725 (2016).
[2] Q. A. Vu, H. Kim, V. L. Nguyen, U. Y. Won, S. Adhikari, K. Kim, Y. H. Lee, W. J. Yu, Adv. Mater. 2017, 29, 1703363.
[3] Won, U.Y., An Vu, Q., Park, S.B. et al. Nat. Commun. 14, 3070 (2023).


Co-Author(s): Woojong Yu (Sungkyunkwan University)

08:00pm - 10:00pm EDT - April 23, 2024 | Room: Flex Hall C, Level 2, Summit
Daryl Yee, Session Chair; Alice Fergerson, Session Chair
Symposia Sessions: MF01: Advances in Polymer-based Soft Matter for Additive Manufacturing
Session Type: Onsite Poster

Tuesday
08:00pm - 10:00pm EDT - April 23, 2024 | Room: Flex Hall C, Level 2, Summit
Tamires Nossa, Presenter
Symposia Sessions: MF01: Advances in Polymer-based Soft Matter for Additive Manufacturing
Session Type: Onsite Poster
Session:

Additive manufacturing technology through 3D printing can efficiently produce parts with complex geometries using smaller, portable equipment. 3D printing plays a significant role in manufacturing polymer prototypes and products in various areas. One promising area of research involves incorporating metal powder into polymer filaments for 3D printing, aiming to expand the versatility of the technique and provide an alternative to conventional approaches such as Fused Filament Manufacturing (FFF). The binder polymer formulation plays a crucial role in the success of the manufacturing process. This study presents the development of a specific binding system for the 3D printing of AlSi10Mg filaments. The binder includes low-density polyethylene (LDPE) and thermoplastic starch (TPS). LDPE contributes to structural integrity during binder dissolution, reduces viscosity, and increases strength and stiffness. Meanwhile, TPS, besides being biodegradable, provides flexibility to the filaments. The study included an analysis of the shape and size distribution of metallic powder particles before their incorporation into the polymeric matrix. The composite filaments were produced using reactive extrusion (REX), being mechanically characterized and evaluated for their homogeneity. The reactive extrusion method demonstrated effectiveness in the production of homogeneous composite filaments in relation to the metallic filler incorporated into the thermoplastic polymer blend. Although extruded filaments exhibit inferior mechanical properties compared to thermoplastics generally used in FFF additive manufacturing, the method has potential for application in the manufacture of new composite filament compositions using LDPE and TPS blend matrix as a binding for application in 3D printing.


Co-Author(s): Gustavo Delfino (Federal Institute of Education, Science and Technology - IFSP), Kaue dos Santos (Federal Institute of Education, Science and Technology - IFSP), Leandro de Camargo (Federal Institute of Education, Science and Technology of São Paulo - IFSP), Haroldo Pinto (University of São Paulo)

08:00pm - 10:00pm EDT - April 23, 2024 | Room: Flex Hall C, Level 2, Summit
Ursula Wurstbauer, Session Chair; Veronica Policht, Session Chair
Symposia Sessions: QT01: Ultrafast Light-Matter Interactions in Quantum Materials
Session Type: Onsite Poster

Tuesday
08:00pm - 10:00pm EDT - April 23, 2024 | Room: Flex Hall C, Level 2, Summit
Matthew Liu, Presenter
Symposia Sessions: QT01: Ultrafast Light-Matter Interactions in Quantum Materials
Session Type: Onsite Poster
Session:

Atomic-level control of two-dimensional materials provides a novel platform for nanoscale photonics and optoelectronics. Two-dimensional silver (2D-Ag) is stabilized via silver intercalation in epitaxial graphene on SiC. Two phases of 2D-Ag, termed Ag(1) and the Ag(2), have been distinguished through 1) in-plane phonon shear modes: Ag(1) at 17 cm-1, and Ag(2) exhibiting two modes at 66 and 92 cm-1 and 2) linear extinction: Ag(1) with two absorption peaks centered around 460 and 650 nm, and Ag(2) with a single band centered around 570 nm. Control of graphene chemistry enables the formation of single phase 2D-Ag, allowing us to explore the inherent differences between Ag(1) and Ag(2). The symmetry breaking at the SiC/2D-Ag interface creates an out-of-plane axial dipole, resulting in strong nonlinear optical (NLO) responses. Second harmonic generation microscopy is implemented to investigate the symmetry and second order susceptibility χ(2) of Ag(1) and Ag(2). Both phases exhibit point group symmetry 3m, verifying the epitaxial growth of the Ag layer on the modified SiC surface. The χ(2) of Ag(2) is orders of magnitude greater than that of Ag(1). The carrier dynamics of 2D-Ag is studied with near-degenerate transient absorption (TA) spectroscopy. Both phases are excited near the resonance frequencies of 2D-Ag, setting pump wavelengths at 575 and 650 nm. Rapid decays (~2 ps) following the initial bleach are observed in the time-resolved TA spectra for both phases. The difference in coherent oscillations between Ag(1) and Ag(2) is attributed to electron-phonon coupling corresponding to the in-plane shear mode of each phase as confirmed with correlated Raman spectroscopy. The results suggest that we are able to tailor the NLO properties and carrier dynamics of 2D-Ag through phase engineering at the atomic level.


Co-Author(s): Arpit Jain (The Pennsylvania State University), Chengye Dong (The Pennsylvania State University), Joshua Robinson (The Pennsylvania State University), Kenneth Knappenberger (The Pennsylvania State University)